超微电动机的应用前景及其关键技术

Application Prospect and Its Key Technology of Ultro-micro Motor

概述静电型、电磁型、压电型超微电动机的国内外研究现状及其技术性能,简要介绍三种关键制造技术。指出由超微电动机构成的微电子机械系统(MEMS)的广阔应用前景。

This article introduces research survey of three types(electrostatic,electromagnetic,piezoelectric type)ultro-micro motors.Its application and key technology is reviewed.