摘要
论述集成无源元件的重要作用,简介集成电阻器、集成电容器、集成电感器技术。系统探讨了多层金属化工艺、主要衬底材料、工艺集成规则、集成无源模块组装工艺、设计方法及设计实例等关键工艺技术。
The importance of the integrated passive components is discussed, including the capacitors, resistors and inductors. The multiplayer moralization technology, main substrate materials, the laws for integrating technologies, design methods are discussed. Some examples are given.
出处
《电子元件与材料》
CAS
CSCD
北大核心
2002年第6期20-22,共3页
Electronic Components And Materials