摘要
对电子回旋共振等离子体中使用的电子能量分析器实验曲线偏离理想情况的几种现象进行了讨论 。
Experimental electron energy distribution function of the electron cyclotron resonance(ECR) plasma,measured with an electron energy analyzer,considerably deviates from Maxwell distribution,especially for low temperature ECR plasma.Possible effects responsible for the deviation were discussed and some appropriate data correction and data fitting techniques were proposed.
出处
《真空科学与技术》
CSCD
北大核心
2002年第3期231-233,共3页
Vacuum Science and Technology
基金
国家自然科学基金资助项目 (1983 5 0 3 0
19875 0 5 3 )
