衍射光学束匀滑器件的精细化设计

Precise Design of Diffractive Optical Element for Beam Smoothing

修正了衍射光学束匀滑器件一维设计公式 ,利用爬山 模拟退火混合优化算法 ,进行了束匀滑器件的精细化设计 ,不仅获得了算法中焦面采样点上的束匀滑光强分布 ,还使焦面上其他非采样点也满足束匀滑光强分布。

In this paper, the conventional formula, used to design diffractive optical element (DOE) for beam smoothing, is modified. By using the hybrid algorithm merging hill-climbing with simulated annealing, the precise design of the DOE for beam smoothing is completed. Besides the used sampling points in the optimization, the intensity distribution of any uncontrolled points and with any sampling interval on the focal plane is consistent with the demand for beam smoothing.