用大像元CMOS线阵光电探测器和插值法测量激光光斑中心位置

Measuring the Laser Beam Position by Using a CMOS Photodiode Array and Interpolation Method

探讨了用大像元 (0 .8mm)CMOS线阵光电探测器确定激光光斑中心位置的插值方法 ,并对插值误差进行了理论分析和实验验证。采用线性插值可使测量分辨率提高 10倍以上。通过实测两种激光准直中光斑中心位置的漂移 ,验证了该探测器及插值方法的实用性。

A method for determining the positions of laser beam has been introduced, in which a photodiode array combined with a CMOS signal processing circuit chip is used as a detector to measure the beam position with a large measurement range. Moreover, an interpolation method is used to improve the resolution of the photodiode array. With successful measurement of the beam shifts for two kinds of laser alignment system, it is confirmed that the photodiode array and the interpolation method are available in laser alignment for long distance.