用双电桥法减小压力传感器输出的温度漂移

Compensation Method of Temperature Drift in Pressure Sensor Using Double Wheatstone-Bridge Method

论述了温度对压力传感器输出灵敏度的影响 ,为了减小传感器输出的温度漂移 ,采用双惠斯登电桥方法 ,在 3 0 0～ 3 73 K的温度范围内对传感器进行测试 ,结果表明传感器输出的温度漂移可以降低 70 %以上。

This paper deals with the effect of temperature upon the output sensitivity of the piezoresistive pressure sensor. In order to reduce the temperature drift of the piezoresistive pressure sensor output, the Double Wheatstone Bridge Method is used to test the sensor with the temperature controlled at the range of 300～373 K. The results indicate that the temperature drift of the sensor output can be lowered over 70%.