摘要
介绍了衍射微透镜阵列的设计原理与制作工艺方法 ,在此基础上运用部分刻蚀法研制出适用于 3~ 5 μm波长多相位 2 5 6× 2 5 6衍射微透镜阵列。利用光通信半导体激光器和探测器建立了一套测试系统 ,并对所设计的多相位衍射微透镜阵列的衍射率和点扩散函数进行了测试 ,8相位和 16相位石英衍射微透镜的衍射率分别高达 80 .2 %和 87.5 % ,完全满足实际应用的要求。
The design and fabrication method for diffractive microlens array are studied. Based on the research achievement, 256×256 multi\|phase diffractive microlens arrays are manufactured for 3~5 μm wavelength. Point spread function and diffractive efficiency of the designed multi\|phase diffractive microlens arrays are measured. The diffractive efficiency of 8\|phase and 16\|phase quartz diffractive microlens arrays are 80.2% and 87.5% respectively, which suggests that the designed multi\|phase diffractive microlens arrays can fulfill practical needs. \;
出处
《红外与激光工程》
EI
CSCD
北大核心
2002年第3期253-256,共4页
Infrared and Laser Engineering
基金
国家自然科学基金资助项目 (60 0 860 0 3)
关键词
衍射微透镜
衍射效率
点扩散函数
二元光学
Diffractive microlens
\ Diffractive efficiency
\ Point spread function
Binary optics