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激光烧蚀铝等离子体中离子特性的实验研究 被引量:3

AN EXPERIMENTAL INVESTIGATION ON THE PROPERTIES OF IONS IN LASER ABLATED Al PLASMA
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摘要 通过外加平行极板直流电场法 ,测定了准分子激光烧蚀Al靶产生微等离子体中离子形成的电流 ,研究了激光能量、气压以及电压等因素对等离子体中的离子特性的影响 ,并对离子产生的机制进行了讨论 . Using the electric field produced by parallel plate electrodes, the ionic current produced by the excimer laser ablating Al target is measured. The influence of pulsed laser power, buffer pressure and electric volt on the dynamic properties of ions in the laser produced plasma are studied, and the mechanism of ion production is discussed.
出处 《安徽师范大学学报(自然科学版)》 CAS 2002年第2期137-139,共3页 Journal of Anhui Normal University(Natural Science)
基金 安师大校青年基金 安师大校科研专项基金 (99ZX12 )
关键词 激光烧蚀 铝等离子体 离子特性 实验 平行板电极 离子电流 laser-induced micro-plasma parallel plate electrodes current of ion
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