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金刚石薄膜异质外延的研究进展 被引量：2

DEVELOPMENT OF RESEARCHES ON HETEROEPITAXY DIAMOND FILMS
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摘要 主要介绍金刚石薄膜在Si上异质外延的研究状况。综述了外延金刚石薄膜的偏压形核 ,SiC过渡层的影响及一些实验参数对外延薄膜质量的影响等 。 The status in the researches on synthesizing heteroepitaxial diamond thin films on silicon is introduced. Bias enhanced nucleation,action of SiC in film deposition and effect of different parameters on qualities of heteroepitaxial are summarized.Some problems that worth further researches in this field are presented.
作者 王传新 汪建华 满卫东 马志斌 王生高 康志成
机构地区 武汉化工学院材料科学与工程系 中国科学院等离子体物理研究所
出处 《真空与低温》 2002年第2期71-76,共6页 Vacuum and Cryogenics
关键词 金刚石薄膜 异质外延 CVD 半导体材料 偏压形核 生长控制 外延生长 diamond thin films heteroepitaxy CVD
分类号 TN304.054 [电子电信—物理电子学] TN304.18 [电子电信—物理电子学]
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参考文献34

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同被引文献46

  • 1Matsumoto S,Sato Y,Tsutsimi M,Vapor deposition of diamond particles from methane[J].J Mater Sci,1982,(17):3106-3110.
  • 2Kanda K, Takehana S.Application of diamond-coated cutting tools[J]. Surface and Coatings Technology,1995,(73):115-120.
  • 3Echigoya J. Growth of diamond films on SiC,WC,and cubic BN Substrates [J].J Mater Sci,1997,32(17):4693-4699.
  • 4Sikder A K. Chemical vapour deposition of diamond on stainless steel:the effect of Ni-diamond composite coated buffer layer[J]. Diamond and Materials,1998,(7):1010-1013.
  • 5Satyendra Kumar.Growth of polycrystalline diamond films on stainless stell without external barrier layers using oxy-acetylene flane[J]. Diamond and Related Materials,1998,(7):1043-1047.
  • 6Alam M,Peebles D E,Tallant D R.Diamond deposition onto WC-6%Co cutting tool material:coating structure and interfacial bond strength[J].Thin Solid Films,1997,(300):164-170.
  • 7Everitt N M,Silva R F,Vieira J.Friction measurements on hot filament CVD diamond films deposited on etched tungsten carbide surfaces[J].Thin Solid Films,1995,(4):730-734.
  • 8Fan W D,Chen X, Agannadham K J.Diamond-ceramic composite tool coatings[J].J Mater Res.,1994,9(11):2850-2867.
  • 9Nesladek M.Adhesion of diamond coatings on cemented carbides[J].Thin Solid Films,1995,(270):184-188.
  • 10Cremer R.Formation of inter-metallic cobalt phases in the near surface region of cemented carbides for improved diamond layer deposition[J].Thin Solid Films,1999,(355/356):127-133.

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真空与低温
2002年 第2期

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