摘要
本文用动态拉伸法研究了基体温度和 Ar 气压力对磁控溅射不锈钢膜与碳钢基体间粘附性的影响。结果表明,基体温度为400℃,Ar 气压力为133—467mPa(1-3.5×10^(-3)mmHg)为最佳。
In this paper,the adhesion between magnetron sputter deposited1Cr18Ni9Ti stainless steel coating and a carbon steel substate was investig-ated.The tensile test was proceeded under SEM with continuous observation.The experimental resuls showed that the adhension was optimium when thesubstratet temperature was 400℃ and argon pressure was in the range of 133to 467mPa.
关键词
磁控溅射
不锈钢涂层
粘附性
碳钢
magnetronsputter
stainless steel coating
adhesion
