准分子激光光束能量均匀化的研究进展

The Research Development of the Excimer Laser Energy Uniformity

准分子激光在微机械加工,医学,光通讯中具有重要应用。但由于准分子激光固有的特性,其光束能量具有不均匀性,从而准分子激光的应用受到极大制约, 因此,近年来,关于准分子激光光束能量均匀化的研究方面,人们进行了大量的理论和实验研究。本文概述了国内外准分子激光在光束能量均匀化方面的研究进展。

The excimer laser has important applications in micro-machine process, medicine and optical communication. But because of the intrinsic property of the excimer laser, the beam energy has asymmetry, so there are some limits in applications of excimer laser. Recent years, people have done many theoretical and experimental researches on the uniformity. This paper summarizes the research developments on the energy uniformity of the excimer laser.