大位移、低电压驱动MEMS静电梳齿驱动器的设计与研究

Design of MEMS comb-drive actuator for large-displacement and low-voltage

分析了MEMS静电梳齿驱动工作原理,以梳齿结构和弹性梁结构为基础,综合考虑了动态特性、可靠性以及加工工艺可行性要求。提出了非等高结构、变形曲臂梁结构、位移放大驱动器、垂直Z向位移静电梳齿驱动器等四种大尺度、低电压驱动线性MEMS静电梳齿驱动器结构设计。利用CAD采用FEA法分别建模、仿真,进行了大位移、低电压驱动MEMS静电梳齿驱动器的动态与静态的研究,并获得20V直流偏置、位移80～130μm、驱动器面积小于2mm×2mm的结果。

This paper presents the design and fabrication of MEMS comb-drive actuator for large-displacement and low-voltage.A new cantilever beam with low spring constants and small area,a displacement-amplifier with short comb fingers,a two-height fabrication flow and a Z-motion actu-ator based on two-height fabrication are described.In the design,FEA method is used to simulate the static and model characters of structures.Presently with20V dc bias,the displacement is from80μm to130μm,the overall area of actuator is less than2mm×2mm.In addition,the dynamic character and the reliability of comb-drive actuator are analyzed.