摘要
采用 YBa_2Cu_3O_(7-x)靶材,用离子束溅射法在多种衬底上得到了接近化学计量的YBa_2Cu_3O_(7-x)单相超导薄膜。
A preliminary investigation of Y-Ba-Cu-O superconductorthin films deposited on different substrate by ion beam sputtering was reported.The experimental results show that this method provides a bette wayto obtain stoichiometric YBa_2Cu_3O_(7-x) superconductor thin film by physicalvapor deposition.
关键词
超导薄膜
离子束溅射法
superconductor films
ion beam sputting
