6061Al合金等离子体基离子注氮表面的动态标度行为

DYNAMIC SCALING BEHAVIOR OF 6061 ALUMINUM ALLOY SURFACE IMPLANTED BY NITROGEN ION USING PLASMA-BASED ION IMPLANTATION TECHNOLOGY

利用原子力显微镜和掠入射X射线散射技术研究了6061Al合金等离子体离子注氮表面的粗糙度和标度行为.研究结果指出,注氮初期,表面粗糙度逐渐下降;当离子注入时间较长时,表面粗糙度随注入时间的延长而逐渐增加;在远离平衡的条件下,材料的形成机制可通过分形理论进行研究.长时间离子注氮表面具有明显的分形特征,利用所得到的静态标度指数、生长指数和动态标度指数讨论了6061Al合金离子注氮表面的标度行为.

The roughness and dynamic scaling behavior of the 6061 Al alloy surface implanted by nitrogen ion using plasma based ion implantation technology were studied by means of atomic force microscope and grazing incidence X-ray scattering. The results indicate that the roughness of the surface decreases with increasing of the implantation time at the implantation initial stage, when the implantation time is longer the roughness of the surface increases with increasing of the implantation time. Under far from equilibrium conditions, the formation mechanism of ion implantation layer can be studied in terms of the fractal theory. The surface exhibits a fractal characteristic after a longer time of implantation. By using the values of static scaling exponent, growth exponent and dynamic scaling exponent, the dynamic scaling behavior is also discussed.