能同时测定三个物理量的RAE

A RAE to Determine Three Parameters Concurrently

旋转检偏器式椭偏仪RAE一般只能同时测定二个物理量,这是因为它只建立起一个复数的测量方程。本文分析表明,RAE 所采集到的信息中,已经足以建立起三个实数的测量方程。因此,无需对RAE 作重大的改造,只更换其计算机软件,就能达到同时测定三个物理量的目的。这对于扩大椭偏仪的功能具有重大意义。

As a ordinary ellipsometric measurement,the Rotating-Analy-zer Ellipsometer (RAE) could concurrently determine two parameters only.This paper points out:it is enough to be set up three irrelative real equati-ons of measurement from the information sampled by the RAE.That is say,it is quite easy to achieve the goal of determing three parameters concurren-tly by changing the computer programming (software) of RAE only,nevermaking great improvement on it.This is of great significance for enlargingfunction of ellipsometer.