计算机辅助纳米级圆度测量技术

Computer-aided Nanometer Roundness Measuring Technique

本文讨论多步法误差分离技术的方法误差和系统误差。按此法由Talyrond3型圆度仪、精密分度转台和IBM-PC 微机组成计算机辅助纳米级圆度测量系统,将圆度仪的测量精度由原来0.025μm 提高到0.002μm。该项技术的推广应用对我国现有圆度仪的技术改造具有重要意义。

The method error and system error of multi-step error sepa-ration technique are discussed in detail in this paper.The computer-aidednanometer roundness measurement system which consists of a Talyrond 3 round-ness instrument,a precision indexing table and an IBM-PC micro-computer,has improved the measuring accuracy of the roundness instrument from origi-nal 0.025μm to 0.002μm.The extended application of this technique has greatsignificance for technical reform of our existing roundness instruments.