分振幅干涉法测量波面误差的检测技术现状及发展趋势

Inspection Technique Status and Developing Trend of Wave Surface Error Measured with Component Amplitude Interferometry

光学波面误差的分振幅干涉法检测技术目前十分活跃。本文简明地叙述了分振幅干涉法测量波面误差的检测技术现状及今后的发展趋势。

The component amplitude interferometry is frequently used for inspectingthe optical wave surface error at present.The inspection technique status anddeveloping trend are briefly described in the paper.