纳米氧化锌薄膜的光致发光特性研究

STUDY OF LUMINESCENCE CHARACTERIZATION ON NANOCRYSTALLINE ZnO THIN FILMS

本文报道了利用低压金属有机气相外延 ( L P-MOCVD)工艺首先在二氧化硅衬底上生长硫化锌 ( Zn S)薄膜 ,然后 ,将硫化锌薄膜在氧气中于不同温度下进行热氧化 ,制备高质量的纳米氧化锌 ( Zn O)薄膜 .X-射线衍射( XRD)结果表明 ,氧化锌具有六角纤锌矿晶体结构 .在 90 0℃退火的样品的光致发光 ( PL )中 ,在波长为 3 .3 e V处观察到一束强紫外光致发光和相当弱的深能级发射 .紫外发光强度与深能级发射强度之比是 80 ,表明纳米 Zn

In this paper,high quality nanocrystalline ZnO film has been prepared by using thermal oxidation of ZnS thin film,which was grown on a SiO 2 subtract by the low pressure metalorganic chemical vapor deposition (LP-MOCVD) technique.The X-ray diffraction (XRD) patterns show that ZnO thin film has a hexagonal wurtzite structure.In photoluminescence (PL) measurements,a strong PL with a full width at half maximum (FWHM) of 62 meV around 3.3 eV was observed from the samples annealed at 900℃ at room temperature.The PL intensity ratio of the UV emission to the deep-level emission is 80 at room temperature,providing evidence of the high quality of the nanocrystalline ZnO films.\;