使用单片微机的离子源弧流稳定系统

ARC CURRENT CONTROL SYSTEM OF ION SOURCE BASED ON SINGLE CHIP MICROCOMPUTER

设计和制造一套使用单片微计算机的离子源弧流稳定系统,使用光纤传递信息以使高压与低压隔离,使得在低压侧用同一系统通过切换来控制直热式和间热式离子源,使之弧流稳定.达到的弧流稳定度优于±1％(F.S.)

A control system of arc current of ION source has been designed and construct-de by using a single chip microcomputer. This system transmits the information of the ION source by optical fibers from the very high voltage side to the ground voltage side. By optical communication, the part of the control system located on the ground voltage side is insulated from the very high voltage. This control system can be used to control the arc current of two different types of ION sources: the direct heating ION source and indirect heating ION source. The stability of the arc current of the ION source using this control system is less than ±1% (F. S.).