摘要
介绍了快速成型技术及其研究方向 ,在研究微机电系统与微细加工技术的基础上 ,对比分析了一些基于快速成型技术的微细加工方法的优缺点及最新研究成果。并且结合我们目前所进行的激光化学液相沉积快速成型技术的研究 ,就这些技术目前所面临的几个关键问题进行了探讨。为实现基于快速成型的微细加工技术的研究提供了有益的参考。
The RP(Rapid Prototyping)technique and its development trends are introduced.Based on the research of MEMS and microfabrication technique the advantages and disadvantages of several microfabrication methods of RP technique are compared and analyzed.Its new progress is also described.Considering the laser chemical liquid deposition(LCLD)used for RP technique,which is being done by us,some key problems related to the techniques are discussed.These provide the useful references for this research field.
出处
《微细加工技术》
2002年第2期5-10,共6页
Microfabrication Technology
