摘要
研究设计了一种亚稳态氦原子束源系统。采用电子激发方法产生亚稳态氦原子 ,利用喷嘴经等熵澎胀形成原子束 ,通过对该原子束的纵向速度进行选择 ,以及利用激光冷却来实现横向准直 ,制备出准单色亚稳态氦原子束。
A system of metastable helium atom beam source has been developed.Metastable helium atoms are produced by electron exicitation.A atom beam has been formed as the gases of metastable helium atoms pass through the nozzle in constant entropy expansion process.Quasi-monochromatic beam of metastable helium atom has been obtained by selecting the longitudial velocity of the atom beam and eleminating its transversal velocity with laser cooling.
出处
《微细加工技术》
2002年第2期24-27,共4页
Microfabrication Technology
基金
中国科学院创新基金资助项目
中国科学院光电研究所微细加工光学技术国家重点实验室开放基金资助项目
关键词
准单色
亚稳态
氦原子束源系统
喷嘴
s:metastable helium
collimation
quasi-monochromatic atom beam
