摘要
通过LIGA技术与微细电火花技术相结合 ,可以在硬质合金、不锈钢等材料上加工出微结构 ,这一新的方法必将拓宽微细加工的能力和应用范围。利用LIGA技术制备线宽 70 μm、厚度达 73 0 μm的铜工具电极 ,采用微细电火花技术在不锈钢片上加工出线宽 90 μm、具有复杂形状的微结构。
The microstructure on the hard metal alloy and stainless steel could be fabricated by LIGA combined with micro-EDM technique. This method extends the capability and application of the micromaching.The copper tool electrode with line width of 70μm and thickness of 730μm has been made by the LIGA technique and then the microstructure with line width 90μm and complex shapes on the stainless steel film has been machined by the micro-EDM technique.
出处
《微细加工技术》
2002年第2期72-74,共3页
Microfabrication Technology
基金
中国科学院知识创新工程资助项目 (U - 5 16 - 5 )
北京市自然科学基金资助项目 (30 2 2 0 0 5 )
