PZT材料在射频滤波器中的应用

PZT Thin Films for RF Resonators and Filters

锆钛酸铅 (PZT)材料有着优良的压电性能 ,其薄膜具有高机电耦合系数、高品质因数的特点 ,适合于制作低插损、大带宽的射频 (RF)滤波器。文中介绍了 RF体声波滤波器的原理、结构和 PZT的材料特性 ,探讨了PZT薄膜的制备、退火、刻蚀工艺的选择与优化 ,并在此基础上设计了应用 PZT薄膜的体声波滤波器 。

PZT thin films, characterized by high Kt and high Q, are suitable for making low insertion, wide bandwidth RF filters. The application feasibility of PZT thin films is demonstrated by detailed studies and designs. Optimization of preparation and fabrication processes is presented for further improving the quality of the piezoelectric films. The performance of the PZT-based bulk acoustic wave filter is also simulated.