钨钴硬质合金电化学蚀刻加工研究

Study on the optical electrochemical machining of WC-Co alloy

对YG6硬质合金电化学蚀刻工艺进行了研究 ,提出了采用光致抗蚀剂作保护膜 ,在生成一定钝化膜的情况下进行电化学蚀刻的方法。在一定的蚀刻深度范围内 ,该工艺的可控性好。

This article studies Optical Electrochemical Maching of WC Co Alloy, presents the technics of electrochemical maching with some passivation film,using photoresist as protecting film. With a certain range of deepness, control performance of the technics and roughness of etched surface is satisfactory.