摘要
为了克服半导体热处理炉中MoSi2发热元件的低温氧化问题,通过添加高Na2O粘土获得了由MoSi2/oxide复合材料制成的发热元件,考查了脱Na工艺前后MoSi2/oxide发热元件使用特性的变化.研究结果表明,脱Na工艺较好地解决了半导体制品热处理装置中石英玻璃管的失透问题,使发热元件的弯曲强度和高温蠕变特性有了明显地改善,提高了发热元件的使用寿命.
The MoSi 2 /oxide composite has been adopted to obtain heating elements for heat treatm ent of semi-conductors because of its excellent low temperature oxidation res istance.The composite was prepared by adding a kind of refined clay with high N a 2 O content to form a networked microstructure,but the high Na 2 O content may be detrimental to the properties of the MoSi 2 /oxide heating elements.The effect of Na 2 O on properties of MoSi 2 /oxide heating elements was investigated and it was found that the quartz gl ass tube in the apparatus of semiconductor heat treatment became opaque when t he heating elements with high Na 2 O content were used.Further,the high Na 2 O content was also responsible for the low bending strength,poor creep beh aviour and short working life of the Na 2 O-unremoved samples.
出处
《材料科学与工艺》
EI
CAS
CSCD
2002年第2期167-169,共3页
Materials Science and Technology
基金
中科院'百人计划'资助项目(2000.8-2003.8)
