一种硅微振动角速度传感器

A silicon micro-mechanical vibratory angular rate sensor

介绍了一种静电驱动、电容检测单自由度硅微振动角速度传感器实验样机的结构、工作原理、加工方法、驱动方法、检测方法和实验结果。实验结果表明,该角速度传感器实验样机已具有一定的性能,其灵敏度为:3.2mV/(o·s-1);量程为:±500o/s;线性度:1%。

A new type of silicon micro -mechani cal vibratory angular rate sensor wi th electrostatic driving and capacitance detection w as presented.The structure and prin ciple of the angular rate sensor was discussed.The prototype was fabricated.The fabrication method,driving and detecting circuit as well as the results of the e xperiment were introduced.A primary test result shows that the scale factor of prototype is 3.2mV /( o ·s -1 ),the scale is ±500 o /s,and the linearity is 1%.