摘要
在概括纳米碳管阵列特异的场发射效应及在场发射器方面应用前景的基础上,介绍了合成纳米碳管阵列的研究历程以及化学气相沉积法在纳米碳管阵列合成方面的重要意义,就当前纳米碳管阵列的快速合成与低温合成两个发展方向进行了概述,并指出等离子体化学气相沉积法能有效地用于纳米碳管阵列的低温合成。
Based on the summary of the remarking field emission effect and promising applications of carbon nanotube(CNT)arrays in the field of field emitters,the course of study on the synthesis of CNT arrays and the importance of ch emical vapor deposition for the synt hesis of CNT arrays are introduced.Large scale synthesis a nd synthesis at low temperature are d escribed.And it is indicated that plasma chemical vapor depositi on(PCVD)can be a very efficient process for th e synthesis of CNT arrays at low temperature.
出处
《功能材料与器件学报》
CAS
CSCD
2002年第2期200-204,共5页
Journal of Functional Materials and Devices
关键词
纳米碳管阵列
化学气相沉积法
场发射效应
carbon nanotube arrays
chemical v apor deposition
field emission effect