喷镀法制备SnO_2膜导电玻璃的研究

Study on conductive glass with SnO_2 film by spray method

用喷镀法将 Sn Cl4溶液喷射到预先加热的玻璃表面 ,制成了薄膜电阻 <70 Ω/□ ,透光率 >88% ,热稳定性 <45 %的 Sn O2 膜导电玻璃 ,研究了膜厚、基底温度、溶液组成对薄膜电阻与透光率的影响。

The transparent and conductive glass with SnO_2 film by spray method has been obtained. The sheet resistance is less than 70Ω/□, the transmittance is greater than 88% and the hot stability is less than 45%. The effect of the film thickness, the substrate temperature and the composition on the sheet resistance and the transmittance is studied.