薄膜生长的Monte Carlo模拟

Monte Carlo Simulation of Thin Films Growth

利用Monte Carlo方法模拟了薄膜的二维和三维生长,引入Morse作用势描述了粒子间的相互作用,并根据势中的作用范围α详细考虑了近邻粒子的影响.研究发现,在:二维生长中各粒子团生长过程曲线存在多重线性分布,且在某一阶段各分布直线满足二分角关系.三维模拟结果表明,随着沉积粒子数的增加,成团粒子数所占百分比下降,这与二维结果相符.

The two-dimension and three-dimension thin film growths were simulated using Monte Carlo method. To describe the interaction between particles, Morse potential is introduced and the influences of neighboring particles are carefully considered according to a. It is the significant discovery in our experiment that the percentage of the number of particles about a certain cluster size is linear with the cluster size and the relationship of which is dimidiate angle at some stage in two-dimensional growth simulation. The results of three-dimensional simulation indicate that the percentage of cluster particles, with monomers being not included, decreases with increase of the number of adatoms, which is in agreement with the results of two-dimensional simulation.