摘要
本文记述了我国研制与生产的各种电子显微镜 ,主要是透射电子显微镜 ,扫描电子显微镜和电子探针X射线微区分析仪。 1 95 8~ 1 95 9年中国科学院长春光学精密机械研究所制成了我国第一台电子显微镜 ,又率先自行设计研制完成 1 0 0kV大型电子显微镜。根据 1 996~ 1 997年国家科委组织的一项调查 ,当时我国拥有 2 0 2 1台电子显微镜 ,包括透射电子显微镜 75 6台 ,扫描电子显微镜 1 1 6 5台 ,合计 1 92 1台。其中 ,进口 91 5台 ,占 4 7.6 % ;我国生产了 1 0 0 6台 ,占 5 2 .4 % ,但大多为中、低档产品。中国科学院北京科学仪器研制中心KYKY ,上海电子光学技术研究所和南京光学仪器厂生产的占国产 1 0 0 6台中的 95 %以上。云南大学 ,北京仪器厂 ,上海第三分析仪器厂和国营 4 5 0
This article describes the development and production of various electron microscopes in China, in particular the transmission electron microscope, scanning electron microscope, and electron probe X ray microanalyzer. The first two domestic prototype electron microscopes were constructed in 1958~1959 in the Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences. According to a survey in 1996~1997, the number of electron microscopes in China had increased to 2021, including 756 transmission electron microscopes (TEM) and 1,165 scanning electron microscopes (SEM). Of the total 1,921 TEMs and SEMs, 1006 were domestically produced (mostly medium and low grade electron microscopes), while the rest were imported. Beijing Scientific Instrument R & D Center (KYKY), Shanghai Electron Optical Technology Research Institute and Jiangnan Optical Instrument Plant produced over 95% of these domestic electron microscopes. Yunnan University, Beijing Instrument Factory, Shanghai No.3 Analytical Instrument Plant and the State run 4503 Factory produced several models of electron microscopes as well.
出处
《电子显微学报》
CAS
CSCD
北大核心
2002年第3期345-358,共14页
Journal of Chinese Electron Microscopy Society
关键词
研制
电子显微镜
仪器制造
生产
中国
electron microscopes
instrumentation
historical survey