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SiGe新技术及其应用前景 被引量:1

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摘要 本文简单的介绍了SiGe技术的优异,应用潜力几发展概况。
出处 《电子产品世界》 2002年第07A期52-53,共2页 Electronic Engineering & Product World
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共引文献106

同被引文献37

  • 1宋晓岚,李宇焜,江楠,屈一新,邱冠周.化学机械抛光技术研究进展[J].化工进展,2008,27(1):26-31. 被引量:48
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  • 6SHARMA A, SHELAR R, KULKARNI R, et al. BSIM4 characterization of current enhancement in short channel s-Si/ SiGe NMOS [C] // Proceedings of the 8th Spanish Conference on Electron Devices. Palma de Mallorca, Spain, 2011: 1 -3.
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