摘要
阐述了利用超薄微压陶瓷弹性体和厚膜技术及特殊的密封技术研制的一种新型陶瓷厚膜微压变送器。这种变送器具有坚固 ,抗腐蚀和磨损以及抗冲击和振动性能 ,且具有宽温范围和高性能价格比 ,其应用将会在微压检测方面起到重要作用。
A novel thick film on ceramic micro pressure transmitter is described.It is applied to a super thin ceramic diaphragn by using thick film techniques and special seal techniques.This micro pressure transmitter is rugged, highly corrosion and abrasion resistant,withstand shocks and vibrations,it has a wide operation temperation range of combined with high stability,accuracy and competitive price.These features make them ideal for process control purposes in automatic machinery and instumentation.
出处
《测控技术》
CSCD
2002年第7期3-5,共3页
Measurement & Control Technology