摘要
简述超精密加工技术现状 ,介绍超精密平面抛光机的工作原理 ,分析达到纳米级超精密抛光的技术难点 ,并阐述了纳米级超精密抛光智能控制系统的实现。
Ultraprecision machining technology situation and operating scheme of plane polishing machine is introduced;key point of the realization of ultraprecision machining is analyzed;design of the intelligent control system of the plane polishing machine with nanograde flatness is under description.
出处
《测控技术》
CSCD
2002年第7期39-42,共4页
Measurement & Control Technology
