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超精密磨削辅助工作台及结构静动态特性研究 被引量：4

Design and Analysis of a Work Table for Ultraprecision Grinding
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摘要 研制了一种基于高刚度PZT作动器的超精密定位工作台 ,其特点是采用弹性铰链预紧和提供工作台侧向刚度 ,结构简单 ,动态响应速度快 ,分辨率高 .为防止PZT作动器受到过大弯力作用和动平台弯曲变形 ,在动平台与PZT作动器间加入弹性缓冲环节和辅助弹性隔离板 .另外 ,对工作台输入输出特性、静动态刚度和模态振型、以及受外力作用时产生的静态位移误差进行了试验研究 .试验数据表明 ,该工作台可作为精密磨床的辅助工作台 。 A novel micro positioning work was developed based on a table high stiffness piezoelectric translator. The characteristics of the micro positioning stage are the use of flexure hinges for providing pre load and lateral stiffness, simplified configuration, rapid dynamic response,and high resolution. In order to avoid shear force acting on the piezoelectric translator and deformation of the moving table, flexure tips and auxiliary flexure isolator are adopted between the moving table and piezoelectric translators.The experiment method was developed to study the input output character, static and dynamic stiffness, vibration models and the static error under acting force. The experiment data show that the micro positioning work table can be used as the auxiliary stage for precision grinding and improving the positioning precision of the machine tools.
作者 张大卫 田延岭 王杏华 高咏生
机构地区 天津大学机械工程学院 香港科技大学机械工程系
出处 《天津大学学报（自然科学与工程技术版）》 EI CAS CSCD 北大核心 2002年第4期506-510,共5页 Journal of Tianjin University：Science and Technology
关键词 超精密磨削 PZT作运器 精密定位工作台 动态物性 结构设计 静态特性 piezoelectric translator precision positioning work table dynamic character
分类号 TG584 [机械工程—精密仪器及机械]
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参考文献8

  • 1[1]Kim J D, Nam S R. A piezoelectrically driven micro-positioning system for the ductile-mode grinding of grinding materials[J].Journal of Materials Processing Technology. 1996,61(4):310-319.
  • 2[2]Kim J D,Nam S R. Development of a micro-positioning grinding table using piezoelectric voltage feedback[M], Part B: Journal of Engineering Manufacture, 1995,209 (B6): 469-474.
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  • 5[5]Gao Yongsheng, Zhang Dawei,Yu Zhiwei. Dynamic modeling of a novel workpiece table for active surface grinding control[J].International Journal of Machine Tools and Manufacture, 2001,41:609-624.
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同被引文献16

  • 1Gao Y Sh, Zhang D W and Yu Ch W. Dynamic Modeling of A Novel Workpiece Table for Active Surface Grinding Control, Int. J. of Mach.Tools Manufact. , 2001,41:609 -624
  • 2Otsuka J and Koshimizu S, et al, An Ultra - fine Motion Using Piezoeletric Actuator for Ultra - precision Grinding, Int. J. of Japan Soc.Prec. Engg. , 1996,30(4) :345 -346
  • 3Zhong Z, Nakagawa T. Development of a Micro Displacement Table for Ultra - precision Machining and Grinding for Curved Surfaces by the Use of It, Int. J. of Japan Soc. Prec. Eng. , 1992,6(2) :102 - 107.
  • 4Kim J D and Nam S R. Development of a Micro - positioning Grinding Table Using Piezoelectric Voltage Feedback, Proc. of the Institution of Mechanical Engineers Part B - Journal of Engineering Manufacture.1995,209 (B6) :469 -474
  • 5Gao Y, Zhang D W,Yu Ch W, et al. Detachment Modeling of A Novel Workpiece Micro - positioning Table Under Preload Hertz Contact,Prec. Eng. , 2002,26( 1 ) :83 -92
  • 6Gao Y, Zhang D W, Yu C W. Dynamic modeling of a novel workpiece table for active surface grinding control. International Journal of Machine Tools & Manufacture, 2001,41(4): 609-624.
  • 7Orynski F, Pawlowski W. The mathematical description of dynamics of the cylindrical grinder. International Journal of Machine Tools & Manufacture, 2002, 42(1): 773-780.
  • 8Singhal P D, kaliszer H. The effect ofworkpiece dimensions and wheel parameters on the surface waviness during grinding. In: Proceedings of the 6th International M.T.D.R.Conference, The Manchester College of Science & Technology, Oxford, New York: Pergamon Press, 1965:629-648.
  • 9Uda Y, Kohno T, Yazawa T. In-process measurement and workpiece-referred form accuracy control system (WORFAC): application to cylindrical turning using an ordinary lathe. Precision Engineering, 1996, 18(1): 50-55.
  • 10Pahk H J, Lee D S, Jong H P. Ultra precision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation. International Journal of Machine Tools & Manufacture, 2001, 41(1): 51-63.

引证文献4

二级引证文献14

天津大学学报（自然科学与工程技术版）
2002年 第4期

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