摘要
主要综述了微机电系统 (MEMS)领域所涉及的微材料、微机械学、微细加工技术、微元器件、封装等基础理论和关键技术的研究现状 ,分析了存在问题 ,指出了今后的研究重点 ,并对其未来发展作了展望 ,提出了相应的发展策略。
Current research status of the basic theory and principal techniques of MEMS such as micro-materials, micro-mechanics, micro-machining, micro-apparatus and packaging is overviewed. The existing problems are analyzed and study emphases are pointed out. The future development of MEMS is prospected and relative developing strategies are put forward.
出处
《组合机床与自动化加工技术》
北大核心
2002年第7期1-3,共3页
Modular Machine Tool & Automatic Manufacturing Technique
