摘要
综合介绍了脉冲激光作为热源用于焊接的工艺特点 ,以及激光束质量或模式对焊接质量的重要意义。简要总结了国内外集成电路制造中脉冲激光焊接技术的应用和发展情况。
Generally introduce the craft futures of pulsed laser used heat sourse in welding,and the important significance of the laser-beam quality/model is discussed on the welding quality.The application and development of pulsed laser welding are simply summed up in the integrated circuit manufacturing of the home and abroad.
出处
《电子工艺技术》
2002年第4期177-180,共4页
Electronics Process Technology
