摘要
本文简要阐述了新型半导体器件 2BT10 0固体放电管的研制 ,在设计上采取了多元胞结构 ,在制作上采用了双面扩散技术 ,提供了一些工艺过程 。
The research and manufacturing of the new type semiconductor 2BT100 solid arrestor is simply introduced in the paper.The multi cell structure is adopted in design,and the double side diffusion technology is used in manufacturing.The process procedure is given and some tested results are also listed.
出处
《微电子技术》
2002年第3期33-35,共3页
Microelectronic Technology
关键词
多元胞
放电管
双面扩散
Multi cell
Arrestor
Double side diffusion
