摘要
介绍了一种改进的制备压电厚膜的 sol- gel新方法 ,通过添加聚乙烯吡咯烷酮 (poly vinyl pyrrolidone,PVP)来抑制厚膜中裂纹的产生 .文中讨论了最大无裂纹膜厚与 PVP摩尔比及热处理的关系 ,并给出了 BST的 SEM显微照片 .
A modified dip-spin method for BST thick films preparation is introduced.In order to avoid crack formation,an organic macromolecule poly vinyl pyrrolidone (PVP),which has the hybrid effect,is dispersed uniformly into a sol-gel solution containing Ba(CH_3COO)_2-Sr(CH_3COO)_2-Ti(OC_3H i_7)_4.The thick films are coated by repetitive spin coatings and then annealed at a proper temperature.The maximum thickness can reach up to 1μm by this modified dip-spin method.The dependence of the thickness on the PVP quantity and Mole density are discussed,and some experimental details as well as the SEM photos of the thick films are given.
基金
国家 973( No.G19990 3310 5 )资助项目
清华大学 985 ( No.985 -信息 -4 0 -重点 -0 5 )资助项目~~
