摘要
研制了一种用于 WDM光通信系统的多层介质膜 Fabry- Perot腔结构式光开关 ,面积为 1.5 m m× 1.5 m m.光开关采用多层复合膜消除内应力 ,防止产生过度变形 ;中心的十字复合梁有利于提高机械灵敏度 ,降低驱动电压 .体硅腐蚀出的硅杯既减小了光开关的插损 ,又便于端面输入输出光纤的精确对准与固定 ,有效降低封装成本 .制成的开关转换电压为 2 0 V,关态隔离度为 87% ,开态插损为 0 .15 d B.其结构和工艺简单 ,易于与 IC工艺相结合形成规模生产 ,如增加膜的层数便能制成基于 F- P干涉仪结构的滤波器 .
A micro-optic-mechanical F-P cavity switch with composite membrane driven by electrostatic actuator for fiber-optic communication applications is reported.The area of the switch is 1.5mm×1.5mm.To eliminate the effect of residual stress,the beams are sandwiched layers consisting of oxide/nitride,where the large tensile stress of nitride is partly compensated by the compression stress of oxide.Therefore,the initial deflection is greatly reduced with the mechanical sensitivity increased at the same time.The silicon bulk micromachining is not only useful for decreasing the insertion loss of the switch,but also easily fixing the fibers and their accurate alignment.The driven voltage is about 20V,and isolation of shutting status is 87% and insertion loss 0.15dB.
