大功率MIP中激发温度和电子密度的测定

Determination of Excitation Temperature and Electron Density in High Power Microwave Induced Plasma

在假设局部热力学平衡的前提下,分别采用Boltzmann作图法和Saha-Eggert解离平衡计算法测定了大功率微波诱导氮等离子体的激发温度和电子密度。实验结果表明,当选择的元素和光谱线不同、引用的跃迁几率等文献参数不同时,会导致激发温度和电子密度的测定结果显著不同。

Measurements of excitation temperature and electron density in high power microwave induced nitrogen plasma were carried out with an assumption of local thermodynamic equilibrium using Boltzmann plot method and Saha-Eggert ionization equilibrium calculation respectively.The experiments showed that the different elements and spectral lines as well as their transition proba-bility data,which were selected for Boltzmann plot and Saha-Eggert calculation,will result in substantial difference in the results of excitation temperature and electron densities.