摘要
介绍了空间相机中的离轴非球面第三反射镜 (矩形口径 )在数控加工过程中在研磨和抛光阶段的检测情况。利用自行研制的非球面测量机对研磨阶段离轴非球面的面形精度进行了测量 ,其最后的研磨精度达到了 1 μm(RMS)。抛光阶段离轴非球面的检测采用的是补偿法 ,其中零位补偿器是补偿检验的关键元件。该离轴非球面的最终面形达到了在 2 0 0mm通光口径内约λ/30的精度 (λ=0 .632 8μm)。
The testing of rectangle aperture off axis aspheric mir ror in the process of computer controlled grinding and polishing is introduced. In grinding process, the aspheric measurement machine is used to measure the su rface error of aspheric mirror, and the final grinding surface error of aspheric mirror is 1 μm(RMS).In polishing process, null compensation testing is used to measure the surface error of aspheric mirror. Null corrector is the important component in compensation testing. At last, the polishing surface error of asph eric mirror is λ/30 in per 200 mm aperture.
出处
《光学技术》
CAS
CSCD
2002年第4期289-290,共2页
Optical Technique
