摘要
综述了化学气相沉积 (CVD)和物理气相沉积 (PVD)工艺的特点与开发 ,以及CVD和PVD镀层及金刚石镀层刀具的性能和应用。中温CVD 。
In this paper, the characters and development of CVD and PVD process, and the performance and application of commonly used CVD, PVD coated and diamond-coated cutting tools have been summarized. The new progress of the technologies of MT-CVD, PVD and diamond-coated cutting tools represents the arrival of a new era in the use of advanced coatings.
出处
《理化检验（物理分册）》
CAS
2002年第7期303-305,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
