二维正弦调制靶的图形转移研究

Study on Figure Transfer Process and the Preparation of Surface Perturbation Target

根据惯性约束聚变分解实验的要求 ,通过激光干涉法在光刻胶表面制备正弦起伏图形 ,结合电镀图形转移工艺 ,获得了波长 2 0～ 10 0 μm、振幅 0 2～ 3 5 μm的一系列Ni基图形转移模板 ,并进一步将正弦起伏图形转移到聚苯乙烯薄膜表面 ,制备出聚苯乙烯二维调制箔靶。研究了图形的精确转移工艺 ,特别是深振幅样品的脱模工艺 ,对工艺参数的优化进行了讨论。采用台阶仪和原子力显微镜监控图形转移过程 ,比较了光刻胶表面图形和一次、二次电镀转移图形以及转移到聚苯乙烯薄膜上图形的形貌 。

According to the request of the resolved experiments of inertial confinement fusion(ICF), sinusoidal surface perturbation figures with the wavelength from 20 to 100 μm and amplitude from 0.2 to 3.5 μm on polystyrene film are prepared. Through laser interference and a nickle electroplate process, perturbation figures on photoresist and nickle plate mold are obtained. The figures are transferred on polystyrene foils by a spin coating process. Figure transfer process is studied, and the transfer precision and surface roughness of the sinusoidal perturbation is measured by α step apparatus and atom force microscope.