摘要
根据空气动力学和相变动力学理论,提出团粒形成的二步经典模型,推导出了团粒形成前后的状态变化规律。设计并制造了一台低熔点金属离化团粒来源。对源的主要性能及其所镀锌膜进行了初步分析。
According to gas dynamics and phase dynamics,the process of clusters formation was treated as two steps, one is the formation of supersonic beams. the other is the condensation. The changes of parameters, such as temperature, pressure, energy, distribution of velocity etc, before and after the cluster formation were given. An ICB source was designed and manufactured. The characteristics of ICB source have been analysed.
出处
《真空》
CAS
北大核心
1991年第1期32-36,共5页
Vacuum