对向平面双阴极磁控溅射装置及超硬涂层研究

Equipment of Magnetron Sputtering with Opposite Double Plane Cathodes and Study on Super-hardness Coated Layer

本文介绍对向平面双阴极磁控溅射装置，同时作为一种制取超硬涂层的新方法，ＴＩＮ涂层的工艺亦在本文中作了讨论．

The equipment of magnetron sputtering with opposite double plane cathodes is introduced in this paper.As a new method for producing the super-hardness coated layer,the process of TiN layer is also discussed here.