金刚石薄膜材料的应用与合成技术

Synthesis Techniques and Applications of Diamond Thin Films Materials

本文对金刚石薄膜的性能、应用，金刚石薄膜的合成方法以及薄膜样品的表征等作了较详细的介绍。并根据金刚石薄膜研究的现状提出应进一步探讨的几个问题。

In this paper, we have given a description of some properties and applications of diamond thin films, synthesis techniques and appraisal of diamond thin films. Several problems are brought up to study on the basis of present situation.