摘要
本文对用微波等离子体化学气相沉积方法，以甲烷和氢气的混合气体为原材，在硅或石英玻璃基片上合成类金刚石薄膜进行了研究，并对微波放电合成类金刚石膜的条件进行了考察和探讨。
In this paper, the synthesis of diamond-like carbon films(DLC)on silicon or silica glass substrate by means of microwave(2450MHz) plasma chemical vapor deposition in a stream of hydrogen methane mixtures was studied. The conditions for formation of diamondlike carbon films in microwave glow discharge were examined and evaluated.
出处
《真空》
CAS
北大核心
1991年第2期32-35,共4页
Vacuum
基金
国家自然科学基金资助项目
