涡轮分子泵三维叶列抽气性能简化计算的几率矩阵法

Co-efficient Matrix Method of Simplified Calculation for the Pumping Performance of Threedimensional Blade Arrangement of Turbomolecular Pump

为了进一步提高泵的性能，现代涡轮分子泵的叶列形状越来越复杂，因此现有的一些计算方法使用时有一定的困难。然而，Ｙ·Ｗｕ［１］［２］提出的几率矩阵法能有效地解决各种复杂形状的叶列性能计算问题，但计算的工作量比较大，尤其是将二维模型改为三维的模型时，这个问题就更为突出。为此，我们利用简化的几率矩阵法，解决了三维模型的计算问题，节省了计算时间，理论计算与实验结果基本上一致［３］。

In order to advance the pump performance, the blade arrangement form of the present turbomolcular pump become more and more complex, there are certain problems for the use of some calculation method.Therefore,Y.Wu gave the co-efficient matrix method effecfively to solve the performance calculation of various types of the complex, blade arrangement. The working capacity of calculation is more heavy, especially when the two-dimensional model is changed into three-dimensional model, the problem is more obvious. So that, we use the simplified co-efficient matrix method to solve the calculation problem of three-dimensional model and save the calculation time, the results of the theoritical calculation are basically accordant with that of the experimental.