可换式抽气面结构的致冷机低温泵

Refrigerator Cryopump with Replaceable Pumping Surface Elements

本文设计了一种口径为φ２００毫米的可换式抽气面结构的致冷机低温泵，粘有吸附剂的抽气板用可拆紧固件固定，具有易装和更换的优越性，其冷阵结构使非凝性气体易流向吸附剂材料。作者分析了冷阵结构与低温泵抽气性能的关系，并用Ｏａｔｌｅｙ—ＭｏｎｔｅＣａｒｌｏ方法对一、二级冷阵结构参数进行了优化，使该泵抽气效率的设计计算值达到了较高水平，对 Ｎ２为０．４０， Ｈ２为０．２２５，尤其对 Ｈ２，远远超过了国外同口径致冷机低温泵的最高指标（０．１５）。

In this paper, refrigerator cryopump with replaceable pumping surface element φ200mm diameter is given, the pumping plate with absorbent may be fixed by removable fasteners which can be easy assembled and replaced. The construction of cold shield should provide ready access to the coated surfaces for the gases to be adsorbed thereon.Here the author analyzed this relationship between the construction of the cold shield and the pumping specifications of cryopump, the higher lever of the calculated values of the pumping coefficients which is 0.41 for N2 0.225H2 for were reached, construction parameters of the first and second cold shield were optimized especially for H2 the designed values greatly exceed the highest values of the by Dottey-Monte Carlo Method same