TRC-2020型磁控溅射镀膜机低温泵的设计考虑

Design Consideration of Cryopump for Magnetron Sputtering Coater TRC-Type 2020

本文从溅射镀膜的要求出发，设计出符合溅射镀膜要求的 ＺＤＢ—２００低温泵。在分析低温抽气机理的基础上，提出了ＺＤＢ—２００型制冷机低温泵的主要参量。为此，在设计一、二级冷阵中，既考虑，到冷阵结构的一合理性，又要考虑冷阵温度分布的均匀一致，同时对如何提高致冷机的致冷效率也进行了讨论。

In this paper, the cryopump type ZDB-200 for sputtering coater is designed. The main parameters of refrigerating cryopump type ZDB-200 are given according to analysis on the cryogenic pumping mechanism. In designing the first and second cold shield,we consider not only rationality of the structure but also the temperature distribution of the cold shields. How to raise the refrigeranting efficiency is also discussed.